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ST0035 Platinum (Pt) Sputtering Target

Catalog No. ST0035
Composition Pt
CAS Number 7440-06-4
Purity ≥99%
Shape Discs, or Custom-made
Diameter 2", 3", 4", 5", 6", or customized
Thickness 0.25", 0.125", or customized
Bond Type Copper, or customized
Synonyms Platinum Sputtering Target, Pt Target

Stanford Advanced Materials (SAM) offers high-purity Platinum (Pt) Sputtering Targets (≥99%) engineered for demanding thin film deposition processes. Platinum's exceptional chemical stability and oxidation resistance make it the preferred choice for semiconductor manufacturing, microelectronics, and advanced research applications. Our Pt sputtering targets are manufactured via vacuum melting and precision machining to achieve fine-grain structure and high density, ensuring consistent sputtering performance and uniform film deposition. Available in standard disc geometries or custom configurations, with copper bonding options for optimized thermal management during DC sputtering.

Related Products: Rhodium (Rh) Sputtering Target, Palladium (Pd) Sputtering Target, Iridium (Ir) Sputtering Target

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Platinum (Pt) Sputtering Target
Platinum (Pt) Sputtering Target
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This Item
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Composition
Pt
CAS Number
7440-06-4
Purity
≥99%
Shape
Discs, or Custom-made
Diameter
2", 3", 4", 5", 6", or customized
Thickness
0.25", 0.125", or customized
Bond Type
Copper, or customized
Synonyms
Platinum Sputtering Target, Pt Target
 
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Dimensions
Customized
CAS Number
7440-03-1
Grade
R04200 R04210
Standard
ASTM B393
Form
Target
Purity
≥99.9%
 
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Material
R4251 (Nb-1Zr) R4261 (Nb-1Zr)
Surface finish
Polished
Dimensions
Circular Targets Diameter 10-400 mm Thickness 2-28 mm
Purity
99.9% 99.95% 99.99%
 
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Material
90% In2O3+10% SnO2 / 95% In2O3+5% SnO2
Purity
>=99.99%
Density
7.1g/cm3

FAQ

Q: What is the difference between Platinum and Pt sputtering targets?

A: They are the same material. "Pt" is the chemical symbol for Platinum. Both terms refer to our high-purity platinum sputtering targets.

Q: What is the lead time for a custom Platinum sputtering target?

A: Typical lead time for custom sizes is 2-3 weeks after order confirmation. Standard disc sizes (2"-6") may ship sooner. Contact us for current stock status.

Q: Do you recommend bonding Platinum targets to a backing plate?

A: For DC sputtering at higher power densities, we recommend bonding to a copper backing plate using indium or elastomer to improve thermal management and prevent target cracking.

Q: What is the difference between 99% and 99.99% purity Pt targets?

A: 99% purity is suitable for most optical and decorative coatings. 99.99% (4N) purity is recommended for semiconductor and advanced research applications where trace elements can affect film performance.

Q: Can you provide the typical sputtering rate for your Platinum target?

A: Sputtering rates depend on your specific tool and parameters. Our technical team can provide reference rates based on your target size and power supply. Please include your system details with your inquiry.

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Send us an inquiry today to learn more and receive the latest pricing. Thank you!

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    Purity

    99.9%

    • 99.9%
    • 99.5%
    • 99.99%
    • 99.999%
    • Other
    Diameter

    2''

    • 2''
    • 3''
    • 4''
    • 5''
    • 6''
    • Other
    Thickness

    0.25''

    • 0.25''
    • 0.125''
    • All
    • Other
    Bonding

    Yes

    • Yes
    • No
    • Other
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